Song, LiuLiuSongOcket, IljaIljaOcketSchreurs, DominiqueDominiqueSchreursNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe Raedt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23104A 60 GHz liquid sensing substrate integrated cavity in LTCCProceedings paper