Ohyama, HidenoriHidenoriOhyamaTanaka, K.K.TanakaSimoen, EddyEddySimoenClaeys, C.C.ClaeysNakabayashi, M.M.NakabayashiKobayashi, K.K.Kobayashi2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5536Radiation damage of polycrystalline silicon filmsOral presentation