High temperature grazing incidence XRD study on in-situ crystallization in ultra-thin oxide films

Zhao, ChaoChaoZhaoRoebben, G.G.RoebbenYoung, EdwardEdwardYoungBender, HugoHugoBenderHoussa, MichelMichelHoussaNaili, MohamedMohamedNailiDe Gendt, StefanStefanDe Gendt2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4972High temperature grazing incidence XRD study on in-situ crystallization in ultra-thin oxide filmsOral presentation