Automatic software for statistical prediction of reading current variability in deeply scaled 3D poly-Si channel SONOS memories

Toledano Luque, MariaMariaToledano LuqueDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRoussel2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21617Automatic software for statistical prediction of reading current variability in deeply scaled 3D poly-Si channel SONOS memoriesMeeting abstract