Recent advances in 3D integration at IMEC

De Moor, PietPietDe MoorRuythooren, WouterWouterRuythoorenSoussan, PhilippePhilippeSoussanSwinnen, BartBartSwinnenVan Hoof, ChrisChrisVan HoofBeyne, EricEricBeyne2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11964Recent advances in 3D integration at IMECProceedings paper