Hikavyy, AndriyAndriyHikavyyClauws, P.P.ClauwsVanbesien, K.K.VanbesienDe Visschere, P.P.De VisschereWilliams, OliverOliverWilliamsDaenen, M.M.DaenenHaenen, KenKenHaenenButler, J.E.J.E.ButlerFeygelson, T.T.Feygelson2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12298Atomic layer deposition of ZnO thin films on boron-doped nanocrystalline diamondJournal article