Thermal stability of NiPt- and Pt-silicide contacts on SiGe source/drain

Demeurisse, CarolineCarolineDemeurisseVerheyen, PeterPeterVerheyenOpsomer, KarlKarlOpsomerVrancken, ChristaChristaVranckenAbsil, PhilippePhilippeAbsilLauwers, AnneAnneLauwers2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12048Thermal stability of NiPt- and Pt-silicide contacts on SiGe source/drainJournal article