Celano, UmbertoUmbertoCelanoVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27992Nanoscale three-dimensional characterization with scalpel SPMBook chapterhttp://onlinelibrary.wiley.com/doi/10.1002/9783527699773.ch8/summary