Trap spectroscopy and Ta penetration induced charge trapping in Porous SiOCH low-k dielectrics

Li, YunlongYunlongLiWu, ChenChenWuDegraeve, RobinRobinDegraeveCroes, KristofKristofCroesBarbarin, YohanYohanBarbarinBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokei2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22693Trap spectroscopy and Ta penetration induced charge trapping in Porous SiOCH low-k dielectricsProceedings paper