Severi, SimoneSimoneSeveriHeck, J.J.HeckChou, T.K.A.T.K.A.ChouBelov, N.N.BelovPark, J.S.J.S.ParkHarrar, D.D.HarrarJain, A.A.JainVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisDe Coster, JeroenJeroenDe CosterVarela Pedreira, OlallaOlallaVarela PedreiraWillegems, MyriamMyriamWillegemsVaes, JanJanVaesJamieson, GeraldineGeraldineJamiesonHaspeslagh, LucLucHaspeslaghAdams, D.D.AdamsRao, V.V.RaoDecoutere, StefaanStefaanDecoutereWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16203CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage deviceProceedings paperurl