Li, YunlongYunlongLiCroes, KristofKristofCroesNabiollahi, NabiNabiNabiollahiVan Huylenbroeck, StefaanStefaanVan HuylenbroeckGonzalez, MarioMarioGonzalezVelenis, DimitriosDimitriosVelenisBender, HugoHugoBenderJourdain, AnneAnneJourdainPantouvaki, MariannaMariannaPantouvakiStucchi, MicheleMicheleStucchiVanstreels, KrisKrisVanstreelsVan De Peer, MyriamMyriamVan De PeerDe Messemaeker, JokeJokeDe MessemaekerWu, ChenChenWuBeyer, GeraldGeraldBeyerDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24135Impact of Cu TSVs on BEOL metal and dielectric reliabilityProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6860630&contentType=Conference+Publications