Plasma-enhanced growth of In seeded Si nanowires and poly-crystalline layers

Iacopi, FrancescaFrancescaIacopiVereecken, PhilippePhilippeVereeckenDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-172021-10-172008-12https://imec-publications.be/handle/20.500.12860/13913Plasma-enhanced growth of In seeded Si nanowires and poly-crystalline layersProceedings paper