A novel approach to characterise a low-k dielectric polymer surface

Martin Hoyas, AnaAnaMartin HoyasSchuhmacher, JorgJorgSchuhmacherLe, Quoc ToanQuoc ToanLeWhelan, CarolineCarolineWhelanSchaekers, MarcMarcSchaekersCelis, Jean-PierreJean-PierreCelisMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6585A novel approach to characterise a low-k dielectric polymer surfaceProceedings paper