Oniki, YusukeYusukeOnikiVereecke, GuyGuyVereeckeDentoni Litta, EugenioEugenioDentoni LittaRagnarsson, Lars-AkeLars-AkeRagnarssonDekkers, HaroldHaroldDekkersSchram, TomTomSchramHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31447RMG patterning by digital wet etching of polycrystalline metal filmsProceedings paperhttps://www.scientific.net/SSP.282.132