Metal oxide semiconductor devices studies of molecula- beam-deposited Al2O3/InP heterostructures with various surface orientations (001), (110), and (111)

Chu, EricEricChuMerckling, ClementClementMercklingDekoster, JohanJohanDekosterKwo, R.R.KwoHong, M.M.HongCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-202021-10-2020121882-0778https://imec-publications.be/handle/20.500.12860/20463Metal oxide semiconductor devices studies of molecula- beam-deposited Al2O3/InP heterostructures with various surface orientations (001), (110), and (111)Journal article