Silicon-on-insulator as a platform for biosensors

Debackere, PeterPeterDebackereDe Vos, KatrienKatrienDe VosScheerlinck, StijnStijnScheerlinckBienstman, PeterPeterBienstmanBaets, RoelRoelBaets2021-10-162021-10-162007-05https://imec-publications.be/handle/20.500.12860/12014Silicon-on-insulator as a platform for biosensorsProceedings paper