Challenges for introducing Ge and III/V devices into CMOS technologies

Heyns, MarcMarcHeynsAlian, AliRezaAliRezaAlianBrammertz, GuyGuyBrammertzCaymax, MattyMattyCaymaxEneman, GeertGeertEnemanFranco, JacopoJacopoFrancoGencarelli, FedericaFedericaGencarelliGroeseneken, GuidoGuidoGroesenekenHellings, GeertGeertHellingsHikavyy, AndriyAndriyHikavyyHoussa, MichelMichelHoussaKaczer, BenBenKaczerLin, DennisDennisLinLoo, RogerRogerLooMerckling, ClementClementMercklingMeuris, MarcMarcMeurisMitard, JeromeJeromeMitardNyns, LauraLauraNynsSioncke, SonjaSonjaSionckeVandervorst, WilfriedWilfriedVandervorstVincent, BenjaminBenjaminVincentWaldron, NiamhNiamhWaldronWitters, LiesbethLiesbethWitters2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20811Challenges for introducing Ge and III/V devices into CMOS technologiesProceedings paper