Investigation of mechanical stress impact on microelectronic devices using a nano-indentation probing system

Liu, YefanYefanLiuHiblot, GaspardGaspardHiblotGonzalez, MarioMarioGonzalezDe Wolf, IngridIngridDe Wolf2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31211Investigation of mechanical stress impact on microelectronic devices using a nano-indentation probing systemMeeting abstracthttps://www.conftool.pro/ecrs10/sessions.php