Influence of electrochemical plating process parameters on corrosion of Cu damascene interconnects

Ernur, DidemDidemErnurWu, WenWenWuBrongersma, SywertSywertBrongersmaTerzieva, ValentinaValentinaTerzievaMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8892Influence of electrochemical plating process parameters on corrosion of Cu damascene interconnectsProceedings paper