Machkaoutsan, VladimirVladimirMachkaoutsanMertens, SofieSofieMertensBauer, R.R.BauerLauwers, AnneAnneLauwersVerheyden, KurtKurtVerheydenVanormelingen, KoenKoenVanormelingenVerheyen, PeterPeterVerheyenLoo, RogerRogerLooCaymax, MattyMattyCaymaxJakschik, StefanStefanJakschikTheodore, D.D.TheodoreAbsil, PhilippePhilippeAbsilThomas, S.S.ThomasGranneman, E.H.A.E.H.A.Granneman2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12530Improved thermal stability of Ni-silicides on Si:C epitaxial layersJournal article