Investigation of Dielectric and Quantum Confinement Based Dopant Deactivation in the Extension Region of FinFET

Saurabh, NishantNishantSaurabhPatil, ShubhamShubhamPatilRawat, AmitaAmitaRawatChiarella, ThomasThomasChiarellaParvais, BertrandBertrandParvaisGanguly, UdayanUdayanGanguly2023-04-062022-08-282023-04-0620220741-3106WOS:000831160000008https://imec-publications.be/handle/20.500.12860/40314Investigation of Dielectric and Quantum Confinement Based Dopant Deactivation in the Extension Region of FinFETJournal article10.1109/LED.2022.3185025WOS:000831160000008NM