Kukner, HalilHalilKuknerWeckx, PieterPieterWeckxRaghavan, PraveenPraveenRaghavanKaczer, BenBenKaczerJang, DoyoungDoyoungJangCatthoor, FranckyFranckyCatthoorVan der Perre, LiesbetLiesbetVan der PerreLauwereins, RudyRudyLauwereinsGroeseneken, GuidoGuidoGroeseneken2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24077BTI reliability from planar to FinFET nodes: Will the next node be more or less reliable?Proceedings paper