Heyns, MarcMarcHeynsNigam, TanyaTanyaNigamDegraeve, RobinRobinDegraeveMertens, PaulPaulMertensSchaekers, MarcMarcSchaekersDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaesHoussa, MichelMichelHoussaVandewalle, N.N.VandewalleAusloos, M.M.Ausloos2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3512Technology and reliability of sub-3nm oxidesProceedings paper