Teugels, LieveLieveTeugelsVan den Eynde, MatthiasMatthiasVan den EyndeDelande, TinneTinneDelandeLeunissen, PeterPeterLeunissen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21605Chemical mechanical polishing of nickel for damascene applicationsOral presentationhttp://www.clarkson.edu/camp/cmp2012.html