Low Weibull slope of breakdown distributions in high-K layers

Kauerauf, ThomasThomasKaueraufDegraeve, RobinRobinDegraeveCartier, EduardEduardCartierSoens, CharlotteCharlotteSoensGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6468Low Weibull slope of breakdown distributions in high-K layersJournal article