Polspoel, WouterWouterPolspoelAguilera, LidiaLidiaAguileraVandervorst, WilfriedWilfriedVandervorstVolodin, AlexanderAlexanderVolodinVan Haesendonck, ChrisChrisVan HaesendonckConard, ThierryThierryConard2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12725Improved nano-scale characterization of high-k dielectrics with vacuum C-AFMMeeting abstract