A flexible 300 mm integrated Si MOS platform for electron- and hole-spin qubits exploration

Li, RoyRoyLiDumoulin Stuyck, NardNardDumoulin StuyckKubicek, StefanStefanKubicekJussot, JulienJulienJussotChan, BTBTChanMohiyaddin, Fahd AyyalilFahd AyyalilMohiyaddinElsayed, AsserAsserElsayedShehata, MohamedMohamedShehataSimion, GeorgeGeorgeSimionGodfrin, ClementClementGodfrinCanvel, YannYannCanvelIvanov, TsvetanTsvetanIvanovGoux, LudovicLudovicGouxGovoreanu, BogdanBogdanGovoreanuRadu, IulianaIulianaRadu2021-12-162021-12-062021-12-1620202380-9248WOS:000717011600067https://imec-publications.be/handle/20.500.12860/38560A flexible 300 mm integrated Si MOS platform for electron- and hole-spin qubits explorationProceedings paper10.1109/IEDM13553.2020.9371956978-1-7281-8888-1WOS:000717011600067