Vertically coupled InP/InGaAsP microring lasers using a single epitaxial growth and single-side lithography

Garcia Lopez, OscarOscarGarcia LopezVan Thourhout, DriesDriesVan ThourhoutVerstuyft, StevenStevenVerstuyftLopez-Amo, ManuelManuelLopez-AmoBaets, RoelRoelBaetsGalarza, MarcoMarcoGalarza2021-10-282021-10-282020-080733-8724https://imec-publications.be/handle/20.500.12860/35151Vertically coupled InP/InGaAsP microring lasers using a single epitaxial growth and single-side lithographyJournal articlehttps://ieeexplore.ieee.org/document/9050819