Wang, C.G.C.G.WangVelasco, H.H.VelascoVerghese, M.M.VergheseShero, E.E.SheroWilk, G.G.WilkMaes, JanJanMaesLaitinen, O.O.LaitinenDeweerd, WimWimDeweerdDelabie, AnneliesAnneliesDelabieOpila, R.L.R.L.OpilaMathew, A.A.MathewDemirkan, K.K.DemirkanMorais, J.J.MoraisBaumvol, I.J.R.I.J.R.Baumvol2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9898Nitrided hafnium silicates for gate dielectricsMeeting abstract