3D Localization of liner breakdown within Cu filled TSV?s by backside LIT and PEM defocusing series

Altmann, FrankFrankAltmannGrosse, ChristianChristianGrosseDe Wolf, IngridIngridDe WolfBrand, SebastianSebastianBrand2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/277443D Localization of liner breakdown within Cu filled TSV?s by backside LIT and PEM defocusing seriesProceedings paper