Martens, DaanDaanMartensDong, GenghuaGenghuaDongBienstman, PeterPeterBienstman2021-10-242021-10-242017-021559-128Xhttps://imec-publications.be/handle/20.500.12860/28929Optimized Si3N4 grating couplers for relaxed alignment requirements under flood illuminationJournal articlehttps://www.osapublishing.org/ao/abstract.cfm?uri=ao-56-5-1286