Le, Quoc ToanQuoc ToanLeBaklanov, MikhaïlMikhaïlBaklanovClaeys, CorCorClaeysSnow, JimJimSnowVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10757Application of porous low-k dielectrics and copper in microelectronicsOral presentation