Vandervorst, WilfriedWilfriedVandervorstSchulze, AndreasAndreasSchulzeEyben, PierrePierreEybenZschaetzsch, GerdGerdZschaetzschKoelling, SebastianSebastianKoellingKumar, ArulArulKumarMody, JayJayModyGilbert, MatthieuMatthieuGilbert2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/200153D-doping in Finfets and nanowires : fabrication and metrology challenges and solutionsOral presentation