Put, BrechtBrechtPutVereecken, PhilippePhilippeVereeckenMeersschaut, JohanJohanMeersschautSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezStesmans, AndreAndreStesmans2021-10-232021-10-2320161944-8244https://imec-publications.be/handle/20.500.12860/27173Electrical characterization of ultrathin RF-sputtered LiPON layers for nanoscale batteriesJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acsami.5b12500