Electrical and opical characterization of thin semiconductor layers for advanced ULSI devices

Simoen, EddyEddySimoenClaeys, CorCorClaeysGaubas, E.E.GaubasRafi, J.M.J.M.Rafi2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11204Electrical and opical characterization of thin semiconductor layers for advanced ULSI devicesProceedings paper