Heyns, MarcMarcHeynsBender, HugoHugoBenderCarter, RichardRichardCarterCaymax, MattyMattyCaymaxConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveDe Witte, HildeHildeDe WitteGroeseneken, GuidoGuidoGroesenekenHaukka, S.S.HaukkaHenson, KirklenKirklenHensonHoussa, MichelMichelHoussaKubicek, StefanStefanKubicekMaes, JosJosMaesNaili, MohamedMohamedNailiNohira, HiroshiHiroshiNohiraTsai, WilmanWilmanTsaiTuominen, MarkoMarkoTuominenVandervorst, R.R.VandervorstWilhelm, RudiRudiWilhelmYoung, EdwardEdwardYoungZhao, ChaoChaoZhao2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5341Alternative gate insulator materials for future generation MOSFETsOral presentation