Sherazi, YasserYasserSheraziChang, Yi-HanYi-HanChangDrissi, YoussefYoussefDrissiChehab, BilalBilalChehabVega Gonzalez, VictorVictorVega GonzalezKim, Ryan Ryoung HanRyan Ryoung HanKimLee, Jae UkJae UkLee2022-09-292022-09-162022-09-262022-09-292022978-1-5106-4979-80277-786XWOS:000844431900009https://imec-publications.be/handle/20.500.12860/40428Design, patterning, and process integration overview for 2nm nodeProceedings paper10.1117/12.2615311978-1-5106-4980-4WOS:000844431900009