CVD-growth of crystalline Si on amorphous or microcrystalline substrates

Beaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmansCaymax, MattyMattyCaymaxNijs, JohanJohanNijsMertens, RobertRobertMertensMonna, R.R.MonnaAngermeier, D.D.AngermeierSlaoui, A.A.Slaoui2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1723CVD-growth of crystalline Si on amorphous or microcrystalline substratesProceedings paper