Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects

Chiodarelli, NicoloNicoloChiodarelliMasahito, SugiuraSugiuraMasahitoKashiwagi, YusakuYusakuKashiwagiLi, YunlongYunlongLiArstila, KaiKaiArstilaRichard, OlivierOlivierRichardCott, DaireDaireCottHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtGroeseneken, GuidoGuidoGroesenekenVereecken, PhilippePhilippeVereecken2021-10-192021-10-1920110957-4484https://imec-publications.be/handle/20.500.12860/18686Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnectsJournal articlehttp://iopscience.iop.org/0957-4484/22/8/085302/