Posada Quijano, GuillermoGuillermoPosada QuijanoCarchon, GeertGeertCarchonSoussan, PhilippePhilippeSoussanPham, NgaNgaPhamMajeed, BivraghBivraghMajeedSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanRuythooren, WouterWouterRuythoorenNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12733Microstrip thin-film MCM-D technology on high-resistivity silicon with integrated through-substrate viasProceedings paper