Thin nanocrystalline CVD diamond films for micro-channel cooling: thermal and elastic properties

Salenbien, RobbeRobbeSalenbienVerstraeten, BertBertVerstraetenPobedinskas, PaulusPaulusPobedinskasJanssens, Stoffel D.Stoffel D.JanssensGlorieux, ChristChristGlorieuxHaenen, KenKenHaenen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17933Thin nanocrystalline CVD diamond films for micro-channel cooling: thermal and elastic propertiesMeeting abstract