Le, Quoc ToanQuoc ToanLeVereecke, GuyGuyVereeckeStruyf, HerbertHerbertStruyfKesters, ElsElsKestersBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20994Wet clean applications in porous low-k patterning processesBook chapter