van der Veen, MarleenMarleenvan der VeenMaes, J. W.J. W.MaesVarela Pedreira, OlallaOlallaVarela PedreiraZhu, C.C.ZhuTierno, DavideDavideTiernoDatta, S.S.DattaJourdan, NicolasNicolasJourdanDecoster, StefanStefanDecosterWu, ChenChenWuMousa, M.M.MousaByun, Y.Y.ByunStruyf, HerbertHerbertStruyfPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2024-05-062023-08-072024-05-0620232380-632XWOS:001027381700030https://imec-publications.be/handle/20.500.12860/42296Selective ALD Mo Deposition in 10nm ContactsProceedings paper10.1109/IITC/MAM57687.2023.10154783979-8-3503-1097-9WOS:001027381700030