Integration of HSQ in the direct-on-metal approach for 0.25-μm technology

Gao, TengTengGaoWitvrouw, AnnAnnWitvrouwCoenegrachts, BartBartCoenegrachtsBruynseraede, ChristopheChristopheBruynseraedeVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4382Integration of HSQ in the direct-on-metal approach for 0.25-μm technologyJournal article