Liyanage, LuckyLuckyLiyanageCott, DaireDaireCottDelabie, AnneliesAnneliesDelabieVan Elshocht, SvenSvenVan ElshochtWong, PhilipPhilipWong2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19323Atomic layer deposition of HfO2 on single walled carbon nanotubesOral presentation