Enhanced accuracy through machine learning-based simultaneous evaluation: a case study of RBS analysis of multinary materials

Magchiels, GoeleGoeleMagchielsClaessens, NielsNielsClaessensMeersschaut, JohanJohanMeersschautVantomme, AndreAndreVantomme2024-11-182024-05-022024-11-1820242045-2322WOS:001198838600062https://imec-publications.be/handle/20.500.12860/43894Enhanced accuracy through machine learning-based simultaneous evaluation: a case study of RBS analysis of multinary materialsJournal article10.1038/s41598-024-58265-7WOS:001198838600062ION-BEAM ANALYSISMEDLINE:38589457