Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuits

Rahim, AbdulAbdulRahimRyckeboer, EvaEvaRyckeboerSubramanian, AnanthAnanthSubramanianClemmen, StephaneStephaneClemmenKuyken, BartBartKuykenDhakal, AshimAshimDhakalRaza, AliAliRazaHermans, ArturArturHermansMuneeb, MuhammadMuhammadMuneebDhoore, SorenSorenDhooreLi, YanLuYanLuLiDave, UtsavUtsavDaveBienstman, PeterPeterBienstmanLe Thomas, NicolasNicolasLe ThomasRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriRottenberg, XavierXavierRottenbergBaets, RoelRoelBaets2021-10-242021-10-242017-020733-8724https://imec-publications.be/handle/20.500.12860/27706Expanding the silicon photonics portfolio with silicon nitride photonic integrated circuitsJournal articlehttp://ieeexplore.ieee.org/document/7589975/