Atomic imaging of nucleation of trimethylaluminium on clean H2O functionalized Ge(100) surfaces

Lee, Joon SungJoon SungLeeKaufman-Osborn, TobinTobinKaufman-OsbornMelitz, WilhelmWilhelmMelitzLee, SangyeobSangyeobLeeDelabie, AnneliesAnneliesDelabieSioncke, SonjaSonjaSionckeCaymax, MattyMattyCaymaxPourtois, GeoffreyGeoffreyPourtoisKummel, Andrew C.Andrew C.Kummel2021-10-192021-10-1920110021-9606https://imec-publications.be/handle/20.500.12860/19269Atomic imaging of nucleation of trimethylaluminium on clean H2O functionalized Ge(100) surfacesJournal article