Modeling impact of electric field and strain on the leakage of embedded SiGe source/drain junctions

Luque Rodriguez, A.A.Luque RodriguezJimenez Tejada, J.A.J.A.Jimenez TejadaRodriguez-Bolivar, S.S.Rodriguez-BolivarBargallo Gonzalez, MireiaMireiaBargallo GonzalezEneman, GeertGeertEnemanClaeys, CorCorClaeysSimoen, EddyEddySimoen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17539Modeling impact of electric field and strain on the leakage of embedded SiGe source/drain junctionsProceedings paper