Wen, Liang GongLiang GongWenAdelmann, ChristophChristophAdelmannVarela Pedreira, OlallaOlallaVarela PedreiraDutta, ShibeshShibeshDuttaPopovici, Mihaela IoanaMihaela IoanaPopoviciBriggs, BasoeneBasoeneBriggsHeylen, NancyNancyHeylenVanstreels, KrisKrisVanstreelsWilson, ChrisChrisWilsonVan Elshocht, SvenSvenVan ElshochtCroes, KristofKristofCroesBommels, JuergenJuergenBommelsTokei, ZsoltZsoltTokei2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27583Ruthenium metallization for advanced interconnectsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7507651